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Seamless ruthenium gap fill Patent Grant Kazem , et al. September 29, 2 [Applied Materials, Inc.]

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Seamless ruthenium gap fill Patent Grant Kazem , et al. September 29, 2  [Applied Materials, Inc.]

U.S. Patent Number 10790188 for Seamless ruthenium gap fill

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Reducing gate induced drain leakage in DRAM wordline Patent Grant Kang , et  al. September 29, 2 [Applied Materials, Inc.]

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PDF) presenting author Contact list

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PDF) presenting author Contact list

PDF) presenting author Contact list

US10755922B2 - Method for depositing silicon-free carbon-containing film as  gap-fill layer by pulse plasma-assisted deposition - Google Patents

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US10755922B2 - Method for depositing silicon-free carbon-containing film as  gap-fill layer by pulse plasma-assisted deposition - Google Patents

US10755922B2 - Method for depositing silicon-free carbon-containing film as gap-fill layer by pulse plasma-assisted deposition - Google Patents